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arXiv · 2605.31144

A Self-Evolving Machine-Learning-Based Kinetic Monte Carlo Method for Modelling Thin-Film Growth

Abstract

We present a kinetic Monte Carlo (KMC) simulation framework parameterized by automatically sampling machine-learning (ML) for modeling thin-film growth atom by atom. Given an interatomic potential energy function, the KMC algorithm builds an ML-based regression model for rate parameters on runtime, being trained on the local atomic environments encountered during the system evolution. New environments are continuously added to the training set in a self-evolving manner at points where the ML model estimates high uncertainty. As the simulation progresses, the ML model gains confidence, and the quick estimation of rates increasingly overtakes the relatively-expensive nudged elastic band calculations, promoting computational efficiency while retaining high fidelity description of the atomic diffusion kinetics. As a test case, we simulate the sub-monolayer growth of Ag on Ag {111}, where we demonstrate adatom islands forming in shapes and densities in accordance with the underlying atomistic interaction model, the theoretical framework, and available experimental results related to thin-film nucleation and growth.

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Jyri Kimari, Flyura Djurabekova, Kostas Sarakinos. 2026-05-29. A Self-Evolving Machine-Learning-Based Kinetic Monte Carlo Method for Modelling Thin-Film Growth. https://arxiv.org/abs/2605.31144

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