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RF-Sputtering Deposition of Nd1-xsrxcoo3 Oriented Thin Films

Lorenzo Malavasi·Carla Sanna·Nathascia Lampis·Alessandra Geddo Lehmann·Cristina Tealdi·Maria Cristina Mozzati·Giorgio Flor
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Abstract

In this paper we reported, to the best of our knowledge, the first deposition of highly oriented thin films (with thickness of about 90 nm) of NdCoO3 and Nd0.8Sr0.2CoO3 cobaltites on single-crystalline STO and LAO substrates. Our investigation has shown that highly oriented single phase thin films of NCO and NSCO can be successfully deposited by means of rf-sputtering if the substrates is heated at high temperatures (700C); lower substrate temperature has shown to lead to multi-phase materials with a low crystallinity degree . LAO substrate showed to give origin to a prefect match of the out-of-plane lattice constant of the NSCO target material.

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Lorenzo Malavasi, Carla Sanna, Nathascia Lampis, Alessandra Geddo Lehmann, Cristina Tealdi, Maria Cristina Mozzati, Giorgio Flor. 2005-08-30. RF-Sputtering Deposition of Nd1-xsrxcoo3 Oriented Thin Films. https://arxiv.org/abs/cond-mat/0508714

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